The University of Tennessee Knoxville - Automated Cluster Sputter Deposition System - RFQ BID1000351 (2026)
The University Of Tennessee System OfficeHigher Ed · Knoxville, TN- Due
- Nov 24, 2026
- 9 days left
- Posted
- Nov 10, 2026
- Primary contact
- Bradley New
- (865) 974-3108
The 30-second brief
The University of Tennessee is soliciting quotes for an automated vacuum cluster physical-vapor-deposition (PVD) system for the Jariwala research group at the Knoxville campus. The procurement includes delivery, installation, acceptance testing, training, a 12-month warranty, and a post-installation service allowance. The system will be used for research-scale deposition of thin films and multilayers of nitride superconductors and ferroelectric/piezoelectric wurtzite nitrides on 150 mm wafers. Responses are due by November 24, 2026, through the University's electronic procurement system.
Automated vacuum cluster platform with central wafer-handling robot, Load locks, Residual gas analyzer, ICP plasma pre-clean module, Multi-cathode magnetron co-sputtering module, Control software, HMI and electrical rack, Vacuum pumps and supply system, Factory acceptance test, Delivery, Installation, Site acceptance test, Training, Service/support allowance, Warranty
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Summary
The University of Tennessee is soliciting quotes for an automated vacuum cluster physical-vapor-deposition (PVD) system for the Jariwala research group at the Knoxville campus.
The procurement includes delivery, installation, acceptance testing, training, a 12-month warranty, and a post-installation service allowance. The system will be used for research-scale deposition of thin films and multilayers of nitride superconductors and ferroelectric/piezoelectric wurtzite nitrides on 150 mm wafers. Responses are due by November 24, 2026, through the University's electronic procurement system.
REQUIRED DELIVERABLES
15- Automated vacuum cluster platform with central wafer-handling robot
- Load locks
- Residual gas analyzer
- ICP plasma pre-clean module
- Multi-cathode magnetron co-sputtering module
- Control software
- HMI and electrical rack
- Vacuum pumps and supply system
- Factory acceptance test
- Delivery
- Installation
- Site acceptance test
- Training
- Service/support allowance
- Warranty
REQUIRED ATTACHMENTS
4- Tennessee Procurement Protection Act Certification
- Pro forma invoice
- 3 references
- Facility-requirements document
- Submit to
- https://fa-ewlq-saasfaprod1.fa.ocs.oraclecloud.com/supplierPortal/faces/FndOverview?fndGlobalItemNodeId=itemNode_supplier_portal_supplier_portal
- Scope location
- Knoxville, TN
- Reported agency
- The University of Tennessee
Questions about this RFQ
How do I respond to this RFQ from The University Of Tennessee System Office?
Review the full solicitation document for submission requirements, evaluation criteria, and deadlines. The submission deadline is November 24, 2026. The solicitation specifies required deliverables that must be addressed in your response. Be sure to include all required attachments as outlined in the solicitation. Submissions should be delivered to: https://fa-ewlq-saasfaprod1.fa.ocs.oraclecloud.com/supplierPortal/faces/FndOverview?fndGlobalItemNodeId=itemNode_supplier_portal_supplier_portal. For questions, contact Bradley New.
Can small businesses or minority-owned firms bid on this RFQ?
Most government agencies, including The University Of Tennessee System Office in TN, encourage participation from small businesses, minority-owned, women-owned, and disadvantaged business enterprises (MBE/WBE/DBE). Check the full solicitation for any small business participation goals.
What happens after the RFQ submission deadline?
After the deadline, the issuing agency reviews all submissions against the stated evaluation criteria. This typically includes a compliance check, technical evaluation, cost analysis, and may involve oral presentations with shortlisted vendors.
Can I ask questions about this solicitation before submitting?
Yes, most solicitations allow vendors to submit questions during a designated period. The primary contact is Bradley New at (865) 974-3108. Questions and answers are typically shared with all prospective bidders.
What are the key deliverables?
The solicitation specifies the following deliverables: Automated vacuum cluster platform with central wafer-handling robot, Load locks, Residual gas analyzer, ICP plasma pre-clean module, Multi-cathode magnetron co-sputtering module, Control software, HMI and electrical rack, Vacuum pumps and supply system, Factory acceptance test, Delivery, Installatio. Proposals should clearly address how each deliverable will be met.
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Where can I find more RFPs from The University Of Tennessee System Office?
All active and historical solicitations from The University Of Tennessee System Office are tracked and searchable. As a higher ed agency, The University Of Tennessee System Office regularly publishes solicitations. Visit the agency profile to see current open bids, past contracts, vendor relationships, and decision-maker contacts.
Is this solicitation still open for submissions?
Based on the posted deadline of November 24, 2026, this solicitation appears to still be accepting submissions. Deadlines may change through amendments or addenda, so always verify the current status directly with the issuing agency before preparing your response.
What documents are required to bid on this RFQ?
Requirements vary by solicitation, but common documents include a technical proposal, cost/price proposal, proof of insurance, relevant certifications, past performance references, and any forms specified in the solicitation. This solicitation specifically requires the following attachments: Tennessee Procurement Protection Act Certification, pro forma invoice, 3 references, facility-requirements document. Review the full document from The University Of Tennessee System Office for the complete list.
What is the scope of this project?
This solicitation defines a specific project scope. The scope covers the following locations: Knoxville, TN. Review the full solicitation for detailed scope requirements.
