University of Missouri-Columbia - Plasma Enhanced Chemical Vapor Deposition (PECVD) System - 27-0044 (2026)
University Of Missouri-ColumbiaHigher Ed · Columbia, MO- Due
- Oct 21, 2026
- Deadline passed
- Posted
- Oct 7, 2026
- Contract term
- 2 years
- Primary contact
- Amanda Barnes
- (573) 884-8695
The 30-second brief
The University of Missouri requests bids for the furnishing and delivery of a Plasma Enhanced Chemical Vapor Deposition (PECVD) System for Missouri S&T's new Semiconductor Engineering Bachelor's degree program cleanroom. The equipment will be used to provide students with hands-on training on microfabrication. Required specifications include vacuum load-lock, silicon dioxide and silicon nitride film deposition, temperature-controlled substrate and upper electrode, chiller, RF generator >= 300 W, LF generator for stress control, corrosive-resistant dry foreline and turbo-molecular pumps, and six MFC-controlled process gas lines for Ar, O2, N2, silane, and spares with gas pods. The submission deadline is October 21, 2026, at 2:00 PM CT, with a question deadline of October 14, 2026. The contract term is 2 years.
Plasma Enhanced Chemical Vapor Deposition (PECVD) system, Software/Hardware, Maintenance/Service Agreement, Training, Installation, Shipping/Freight, Discount
Lowest bid price meeting all specifications
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Summary
The University of Missouri requests bids for the furnishing and delivery of a Plasma Enhanced Chemical Vapor Deposition (PECVD) System for Missouri S&T's new Semiconductor Engineering Bachelor's degree program cleanroom.
The equipment will be used to provide students with hands-on training on microfabrication. Required specifications include vacuum load-lock, silicon dioxide and silicon nitride film deposition, temperature-controlled substrate and upper electrode, chiller, RF generator >= 300 W, LF generator for stress control, corrosive-resistant dry foreline and turbo-molecular pumps, and six MFC-controlled process gas lines for Ar, O2, N2, silane, and spares with gas pods. The submission deadline is October 21, 2026, at 2:00 PM CT, with a question deadline of October 14, 2026. The contract term is 2 years.
EVALUATION CRITERIA
Lowest bid price meeting all specifications
REQUIRED DELIVERABLES
7- Plasma Enhanced Chemical Vapor Deposition (PECVD) system
- Software/Hardware
- Maintenance/Service Agreement
- Training
- Installation
- Shipping/Freight
- Discount
REQUIRED ATTACHMENTS
Solicitation Terms and Conditions, Instructions to Respondents
- Submit to
- https://umsystembids.ionwave.net/PublicDetail.aspx?bidID=1044&SourceType=2
- Scope location
- Columbia, MO
- Reported agency
- University of Missouri-Columbia
Questions about this BID
How do I respond to this Bid from University Of Missouri-Columbia?
Review the full solicitation document for submission requirements, evaluation criteria, and deadlines. The submission deadline is October 21, 2026. The solicitation specifies required deliverables that must be addressed in your response. Be sure to include all required attachments as outlined in the solicitation. Submissions should be delivered to: https://umsystembids.ionwave.net/PublicDetail.aspx?bidID=1044&SourceType=2. For questions, contact Amanda Barnes.
Can small businesses or minority-owned firms bid on this Bid?
Most government agencies, including University Of Missouri-Columbia in MO, encourage participation from small businesses, minority-owned, women-owned, and disadvantaged business enterprises (MBE/WBE/DBE). Check the full solicitation for any small business participation goals.
What happens after the Bid submission deadline?
After the deadline, the issuing agency reviews all submissions against the stated evaluation criteria. This typically includes a compliance check, technical evaluation, cost analysis, and may involve oral presentations with shortlisted vendors.
Can I ask questions about this solicitation before submitting?
Yes, most solicitations allow vendors to submit questions during a designated period. The primary contact is Amanda Barnes at (573) 884-8695. Questions and answers are typically shared with all prospective bidders.
What are the key deliverables?
The solicitation specifies the following deliverables: Plasma Enhanced Chemical Vapor Deposition (PECVD) system, Software/Hardware, Maintenance/Service Agreement, Training, Installation, Shipping/Freight, Discount. Proposals should clearly address how each deliverable will be met.
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What are the evaluation criteria for this solicitation?
This solicitation includes specific evaluation criteria that will be used to score proposals. The criteria include: "Lowest bid price meeting all specifications" Vendors should carefully align their proposals with each criterion to maximize their score.
Where can I find more RFPs from University Of Missouri-Columbia?
All active and historical solicitations from University Of Missouri-Columbia are tracked and searchable. As a higher ed agency, University Of Missouri-Columbia regularly publishes solicitations. Visit the agency profile to see current open bids, past contracts, vendor relationships, and decision-maker contacts.
What is the contract term for this solicitation?
The anticipated contract term is 2 years. Contract terms may include renewal options.
What documents are required to bid on this Bid?
Requirements vary by solicitation, but common documents include a technical proposal, cost/price proposal, proof of insurance, relevant certifications, past performance references, and any forms specified in the solicitation. This solicitation specifically requires the following attachments: Solicitation Terms and Conditions, Instructions to Respondents. Review the full document from University Of Missouri-Columbia for the complete list.
What is the scope of this project?
This solicitation defines a specific project scope. The scope covers the following locations: Columbia, MO. Review the full solicitation for detailed scope requirements.